Dektak profilometer manual

The Dektak XTL™ stylus profilometer accommodates samples up to 350mm x 350mm, bringing legendary Dektak® repeatability and reproducibility to large-format wafer and panel manufacturing. The Dektak XTL features pneumatic passive isolation and a fully enclosed workstation with a wide, easily accessible interlocking door, making it ideal for today's demanding production floor environments. 1. Turn on the computer. 2. Turn on the Dektak at the back right of the tool, there is a toggle switch. The "1" is on, the "0" is off. 3. Log in to the computer. The username and password are written on the computer monitor. Checking the vibration isolation table: 1. The Dektak is a profilometer for measuring step heights or trench depths on a surface. This is a surface contact measurement technique where a very low force stylus is dragged across a surface. The display range of the data is 200 A to 655,000 A (65.5 um) with a vertical resolution of ~ 5 A. The lateral resolution is limited by the tip shape. The DektakXT™ system may be set up and operated only in accordance with the instructions outlined in this manual. In the chapters that follow, the messages below indicate that special vigilance is required. SAFETY FEATURES Several features of the DektakXT system ensure operator safety. Red Emergency Off Button Veeco Dektak VIII Profilometer. Manual coming soon! The University of Texas at Dallas the dektakxt stylus surface profiler is an advanced thin and thick film step height measurement tool with the following characteristics: - equipment compatible with 2", 4", 6" and 8'' wafers - selectable magnification, 1 to 4mm fov - scan length range 55 mm with stitching option - vertical range 1 mm - step-height repeatability of 5a - … research or industry application. The standard Dektak 150 utilizes a new-design, 4 x 4-inch X-Y stage with manual theta. 3D MAPPING AND AUTOMATION PACKAGES The Dektak 150 also can be configured with a 4-inch Y auto stage that enables 3D imaging. Or it can be equipped with a 6-inch X-Y auto stage that, in addition to 3D mapping, The automation program can be used to automate the use of the profilometer. Multiple scans, with different specifications, at different locations on a wafer can be programmed and executed by running this program. The detailed description of this is available in Dektak 8M Manual. 1.6.7 Stress analysis Body. Profilometry allows users to get a 2D trace of surface topographic features through contact with a stylus. The Dektak profilometer determines film thickness, feature heights in microfluidic devices, 3D-printed devices or feature depths in laser cut samples. It can also show the surface roughness of substrates. The Dektak 3ST profilometer is a stylus-type surface profiler. It is equipped with a camera for locating the region of interest, manual sample manipulation & tilt correction, and profile analysis software. It can be used to get a rough idea of the topography of features by scanning a single line across the surface. Features as small as 100 nm Dektak manual is available for use at the tool. 1.4 Safety a) Pay attention to safety symbols on the equipment. b) Follow the operating procedure described here to use the tool safely. 1.5 Precautions a) Always use clean samples to avoid contaminating the stylus or the chuck. Use nitrogen spray gun and IPA if needed. b) Dektak manual is available for use at the tool. 1.4 Safety a) Pay attention to safety symbols on the equipment. b) F